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Coherent
LAMBDA SX
LAMBDA SX
LAMBDA SX

High power industrial excimer laser providing highly stabilized UV power.

The LAMBDA SX Series

The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor.It is designed to deliver the best energy stability available and also features a number of innovative technologies for unsurpassed performance and reliability. It is available from 300 Watts (248 nm and 308 nm) to 600 Watts (308 nm only).

The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
LAMBDA SX K300
248
300
1000
300
LAMBDA SX C300
308
300
1000
300
LAMBDA SX C600
600
1000
600
LAMBDA SX E300
300
1050
315
LAMBDA SX E500
500
1000
500
Applications
Application
Process
Material

Ink-Jet Nozzle Drilling
3D-Structuring
Roll-To-Roll Circuit Patterning
Pulsed Laser Deposition
Automotive Cylinder Hardening
Excimer Laser Annealing
Sequential Lateral Solidification
Ablation-Material Removal
Ceramic
Glass
Polymer
Plastic
Metal
Semiconductor
Features & Benefits

LAMBDA SX Key Feature
Customer Benefit
High Stabilized UV Power
Fast, large area processing at lowest costs per Watt
ExiScope Software (optional)
Onboard logging and evaluation of laser parameters
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Adjustable Pulse Energy
Advanced process control
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel
Solid-State Switch
Maintenance-free operation
Purged, External Resonator Design
Highest beam stability and optics lifetime
Corona Preionization
Stable, homogeneous output
Metal Ceramic Tube
Extended tube lifetime
Energy Monitor
Preset, stabilized energy output


Accessories

Accessory for LAMBDA SX
Analysis Software ExiScope
Fast Photodiode
STEP UP TRANSFORMER 30 kVA
STEP UP TRANSFORMER 60 kVA

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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