Ask a Question
Coherent
LPXpro
LPXpro
LPXpro

Medium-Power multi-purpose excimer laser providing a broad range of UV power.

LPXpro is a family of RoHS compliant excimer lasers offered at wavelengths of 193 nm, 248 nm, 308 nm and 351 nm, with output powers as high as 90W at 248 nm. The beam quality, high pulse energy, short pulse length and high peak power of LPXpro lasers combine to optimize UV applications.

Medium-Power multi-purpose excimer laser providing a broad range of UV power.

LPXpro is a family of excimer lasers offered at wavelengths of 193 nm, 248 nm, 308 nm and 351 nm, with output powers as high as 90W at 248 nm. The beam quality, high pulse energy, short pulse length and high peak power of LPXpro lasers combine to optimize UV applications.

These characteristics, plus their proven reliability and low cost of ownership, make LPXpro lasers suitable for a wide range of demanding, high-precision processing tasks. These include drilling, pulsed laser deposition (PLD), laser direct patterning (LDP), laser lift off (LLO), and cleaning.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
LPFpro 205
157
50
50
2.5
LPFpro 220
200
40
7
LPFpro 205
193
50
400
15
LPFpro 220
200
250
40
LPXpro 210
100
450
30
LPXpro 220
200
300
50
LPXpro 240
300
160
4
LPXpro 305
50
600
20
LPXpro 210
248
100
800
70
LPXpro 220
200
550
80
LPXpro 240
400
300
64
LPXpro 305
50
1100
40
LPXpro 210
308
100
500
45
LPXpro 220
200
400
55
LPXpro 305
50
700
30
LPXpro 210
351
100
400
20
LPXpro 220
200
200
26
LPXpro 240
400
120
22
LPXpro 305
50
400
15
Applications
Application
Process
Material

3D-Structuring
Etch Barrier Patterning
Interferometric Nanostructuring
Laser Lift-Off
Fiber Bragg Grating Production
Diamond Like Carbon Coating
Dopant Activation
Ablation-Material Removal
Heat Treating
Ceramic
Glass
Polymer
Semiconductor
Plastic
Composite
Metal
Features & Benefits

LPXpro Features & Benefits
Stabilized Laser Energy of up to 1 Joule in UV for fast and large are processing
Individual laser pulse pattern by an internal burst generator
Short UV light for precise micro processing
Attractive cost per Watt UV laser power ratio

Accessory for LPXpro
Unstable Resonator Optics 193 ,248, 308, 351 nm (external resonator configuration)
Unstable Resonator Optics 193, 248 nm (LPXpro 240)
Upgrade Kit VCR Gas Connections
Beam Aligner

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


I have read the terms and conditions