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IndyStar Excimer Laser
IndyStar Excimer Laser

IndyStar

Fast Pulse, High Precision Processing

IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser.

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Fast Pulse, High Precision Processing

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
IndyStar 1 kHz
193
1000
8
8
IndyStar 2 kHz
2000
4
IndyStar 1 kHz
248
1000
12
12
IndyStar 2 kHz
2000
6

Applications

Application
Material
• Photomask Inspection
• Ink-Jet Nozzle Drilling
• Semiconductor
• Glass
• Plastic

Features & Benefits

IndyStar Key Feature
Customer Benefit
Semi-S2 Certified Design
High uptime
Corona Preionization
Stable, homogeneous output
Solid-State Switch
Maintenance-free operation
Almeta Tube
Extended tube lifetime
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Energy Monitor
Preset, stabilized energy output
Single Phase Supply
Easy integration

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