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IndyStar Excimer Laser
IndyStar Excimer Laser

IndyStar

Fast Pulse, High Precision Processing

IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser.

Fast Pulse, High Precision Processing

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
IndyStar 1 kHz
193
1000
8
8
IndyStar 2 kHz
2000
4
IndyStar 1 kHz
248
1000
12
12
IndyStar 2 kHz
2000
6

Applications

Application
Material
• Photomask Inspection
• Ink-Jet Nozzle Drilling
• Semiconductor
• Glass
• Plastic

Features & Benefits

IndyStar Key Feature
Customer Benefit
Semi-S2 Certified Design
High uptime
Corona Preionization
Stable, homogeneous output
Solid-State Switch
Maintenance-free operation
Almeta Tube
Extended tube lifetime
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Energy Monitor
Preset, stabilized energy output
Single Phase Supply
Easy integration