
VarioLas processing systems based on the powerful COMPex excimer laser are flexible tools for high-quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each VarioLas model available at 193 nm, 248 nm, and 308 nm.
VarioLas Key Features & Benefits |
High-resolution optics and mechanics ensure reproducible results |
Modular design with tailored options for flexible use |
Square beam and line beam fields for optimum results |
Compatible with all COMPex laser models to enable efficient processing |
VarioLas Model | VarioLas Eco
|
VarioLas Pro
|
VarioLas Sweep
|
Field Geometry | Square
|
Square
|
Line
|
Substrate Field Size (mm2) | 2 x 2
|
2 x 2
|
50 x 0.6
|
Optical Resolution (μm) | 30
|
5
|
-
|
Working Distance (mm) | 50
|
50
|
150
|
Max. Repetition Rate (Hz) | 100
|
100
|
100
|
Max. Energy Density (mJ/cm2) at 193 nm | 2500
|
2500
|
500
|
Max. Energy Density (mJ/cm2) at 248 nm | 7500
|
7500
|
1300
|
Max. Energy Density (mJ/cm2) at 308 nm | 6000
|
6000
|
1000
|
Energy Stability (%, 1 sigma) at 193 nm | 2
|
2
|
2
|
Energy Stability (%, 1 sigma) at 248 nm | 1
|
1
|
1
|
Energy Stability (%, 1 sigma) at 308 nm | 1
|
1
|
1
|